Semiconductors

                                SPIRE CORPORATION
                             2007 STOCK EQUITY PLAN

     1. PURPOSE. The purpose of the Spire Corporation 2007 Stock Equity Plan
(the "2007 Plan") is to assist Spire Corporation, a Massachusetts corporation
(the "Company") and its Related Entities (as hereinafter defined) in attracting,
motivating, retaining and rewarding high-quality executives and other employees,
officers, directors, consultants and other persons who provide services to the
Company or its Related Entities by enabling such persons to acquire or  . . .